In currency ETFs, the euro was little changed after the European Central Bank boosted a key interest rate as expected.
Yen ETFs were higher after a recent slide.
Elsewhere, in bonds, ETFs that invest in Treasuries were lower Thursday as a deadline loomed on the U.S. budget.
The $56.6 billion gold ETF booked a fresh record high but ended the session flat.
Gold and silver miner ETFs were mixed Thursday after their recent breakout.
Global X Silver Miners ETF (NYSEArca: SIL)